足球比分007

Manufacturing and processing technology of micro devices
  • Manufacturing method of MEMS and NEMS equipment with stacked stop element
    The invention belongs to electromechanical equipment, in particular mems (micro electromechanical systems) or nems (nano electromechanical systems), especially devices that include millimeter, micron and even nanometer-sized movable elements and are electrodeposited, such as electrostatic sensors or actuator Device. In mems devices, attractive or repulsive forces, especially electrostatic interactions, are often used to obtain electrical functions such as actuation or detection. The simple form of the electrostatic actuator itself ...
  • Manufacturing method of MEMS and NEMS equipment with stacked stop element
    The invention belongs to electromechanical equipment, in particular mems (micro electromechanical systems) or nems (nano electromechanical systems), especially devices that include millimeter, micron and even nanometer-sized movable elements and are electrodeposited, such as electrostatic sensors or actuator Device. In mems devices, attractive or repulsive forces, especially electrostatic interactions, are often used to obtain electrical functions such as actuation or detection. The simple form of the electrostatic actuator itself ...
  • Method, system, storage medium and process for monitoring process parameters of Bosch process
    The invention relates to semiconductor manufacturing, in particular to a method for monitoring process parameters of a bosch process, a system for monitoring process parameters of a bosch process, and a computer-readable storage medium. With the diversification of micro-electro-mechanical systems (mems) products, a bosch process has emerged. The bosch process ...
  • Method and process for manufacturing suspended infrared thermal reactor on substrate
    The invention belongs to silicon micromechanical sensing, and particularly relates to a method for manufacturing a suspended infrared thermal reactor on a substrate. With the rapid development of mems technology, infrared detectors based on mems micro-machining technology are widely used in thermopile infrared detectors due to their small size and low price. They are now widely used in non-contact temperature measurement and gas sensing , Security, satellite attitude control, infrared imaging and other fields. Compared with thermal reactor infrared detector ...
  • Electric device, manufacturing method and process thereof
    The present disclosure generally relates to an electrical device and a method of manufacturing the same. More specifically, the present disclosure relates to an electrical device including a film and a method of manufacturing the same. In some electrical devices (such as bulk acoustic wave (baw) filters, micro-electro-mechanical systems (mems), etc.), a film (such as a resonator film) or a thin film is required in the middle of the die. In order to avoid adversely affecting the performance of the electrical device, the membrane should be isolated from any other physical ...
  • Manufacturing method of automatic debonding machine
    The utility model relates to a debonding machine, in particular to an automatic debonding machine, which belongs to micro-nano. In the field of mems, debonding is a commonly used processing method. Generally, the substrates that have been glued together are thermally slipped to separate the two substrates again. During the debonding process, the upper and lower suction cups must always be parallel, otherwise the substrate will be broken or the substrate separation cannot be completed. The current debonding machine is difficult to meet the debonding ...
  • Manufacturing method for cross-shaped precise solid-state nanopore
    The utility model belongs to the preparation of solid nanopores, and particularly relates to a preparation tool for cross-shaped precise solid nanopores. With the improvement of micro-nano processing technology, it has become possible to prepare nanopores on solid film materials that meet the requirements of single molecule detection. Compared with biological nanopores, solid nanopores have the advantages of stable structure, high mechanical strength, strong environmental tolerance, controllable pore size, and low cost. Silicon nitride film due to material ...
  • Manufacturing method of semiconductor chip
    The invention relates to a semiconductor chip, and in particular to a semiconductor sensor chip having a sensor device and a processing circuit for processing signals from the sensor device. According to the present application, the sensor device tends to be integrated on a semiconductor substrate. The advantage of this manufacturing is that compared with the discrete sensor device, the size of the sensor device can be greatly reduced, and the corresponding sensing element can be integrated with the processing circuit on the same semiconductor substrate ...
  • Electrostatic MEMS actuator and its manufacturing method and process
    The present invention relates to a micro-electromechanical actuator (mems) that can be moved (laterally) in a chip plane, in which a vertical pull-in effect is difficult to occur and / or a large size in a thickness direction is possible. The invention also relates to a method for manufacturing such a mems. The invention particularly relates to a depression of a voltage regulating electrode of a laterally deflectable electrostatic bending actuator lnd (lateral nano-electrostatic driver), which is used to avoid hanging when the lnd actuator is packaged ...
  • Simple-supported cantilever structure MEMS piezoelectric vector hydrophone and preparation method and process
    The invention relates to sensing, in particular to a simple-supported cantilever structure mems piezoelectric vector hydrophone and a preparation method thereof. Due to the emergence of nuclear submarines and the improvement of noise reduction technology, the detection of underwater targets has turned into low frequency noise for testing propellers. Vector hydrophones can measure vector parameters in the sound field, such as displacement, velocity, acceleration, and so on. Compared with scalar hydrophone, its anti-isotropic noise capability has been improved, which can realize low frequency, ...
  • Manufacturing method of graphene resonance gas sensor based on two-dimensional metal thin film
    The invention relates to a graphene resonance gas sensor, and in particular, to a process for preparing a graphene resonance gas sensor based on a two-dimensional metal thin film. With the development of science and technology and the gradual expansion of the technology scale, the types and quantities of harmful gases used in production and production processes have also continuously increased, resulting in increasingly serious atmospheric pollution, causing serious environmental problems and causing great human survival Threat to all kinds of toxic and harmful in real time ...
  • Manufacturing method of nano connecting device
    The utility model relates to processing and manufacturing, in particular to a nano-operation and connection device. Nano-manipulation technology uses probes, electron beams, light, etc. to peel, pick up, relocate, place, and controllable deformation of nano-materials. Its operation and positioning accuracy can reach nano-level, and then realize the processing and assembly of nano-materials The key to structural assembly of next-generation nano-components. Nano-connection technology is based on chemical deposition, high-energy beam irradiation, ultrasonic ...
  • Manufacturing method of MEMS catalytic combustion sensor
    The utility model belongs to a sensor, and particularly relates to a mems catalytic combustion sensor and a processing method thereof. In the process of coal mining, in order to ensure the safety of operations, it is often necessary to detect the concentration of various alkane gases. At this time, catalytic combustion sensors are often used. The traditional catalytic combustion sensor includes a detection element and a compensation element, the detection element and the compensation element constitute a measuring bridge, and the role of combustible gas in the detection element carrier and the catalyst ...
  • Manufacturing method of film expanding device of expander
    The utility model belongs to processing equipment, and particularly relates to a film pressing device of a sheet expanding machine. Mems (micro-electro-mechanical systems) need to be expanded after laser scribing. During the expansion process, the UV film and the carrier film must be pressed together to prevent the carrier film from retracting. Film, the staff needs to touch the inner ring position of the wafer by hand, the ...
  • Manufacturing method of MEMS device
    The present disclosure relates to semiconductors, and more particularly, to a mems device. Micro-electro-mechanical system (mems) is the use of integrated circuit manufacturing technology and micro-processing technology to manufacture microstructures, microsensors, microactuators, control processing circuits, and even interface circuits, communication circuits and power supplies in one Micro integrated system on multiple chips. micro...
  • Method, system and process for manufacturing a system including first and second microelectromechanical elements
    The invention relates to a method for manufacturing a system comprising a first microelectromechanical element and a second microelectromechanical element. Microelectromechanical sensors for measuring, for example, acceleration, rotational speed magnetic fields, or pressure are known and manufactured in large quantities at the wafer level for various applications in the automotive and consumer fields. Developments in this field are decisively driven by the further miniaturization of the components, thereby saving space and costs. Accordingly, at least two different microcomputers ...
  • Wafer-level vacuum integrated packaging structure and manufacturing method and process thereof
    The present invention relates to chip packaging, and in particular, to a wafer-level vacuum integrated packaging structure and a manufacturing method thereof. Metal packaging, ceramic packaging, plastic packaging, these packaging forms are mostly carried out in the form of devices, often complex assembly, low efficiency, and higher costs. Optical devices or mems devices have strict requirements, such as the design of optical windows, need to consider the window field of view, thickness, ar film, heat dissipation, reliability requirements for materials, ...
  • Method and process for preparing nano-fluid diode with dual response to temperature and pH based on solid-state nanopore
    The invention belongs to a nanofluidic device, and relates to a method for preparing a nanofluid diode based on solid-state nanopores with dual response to temperature and pH, which is realized by modifying polylysine molecules to the inner surface of solid-state nanopores. Polylysine (pll) is widely used in tissue sections, slide adhesion, and cell culture in vitro. As a polycation molecule, pll interacts with anions on tissue sections to produce strong adhesion, ...
  • Large-area preparation and flexible transfer method and process of metal nanoparticle array
    The invention relates to a nano material, in particular to a large-area preparation and flexible transfer method of a metal nano particle array. In nanometers, nanoparticles have attracted wide attention due to their unique electrical and optical properties. Especially the large-scale uniform and ordered nanoparticle array structure has important research significance in plasma research, biosensing, and electrochemical energy storage . For example, in the research of surface enhanced Raman scattering, it is sensitive and efficient ...
  • Manufacturing method of aluminum nitride substrate and III-nitride laminated body
    This application is a divisional application of the following applications: Invention Name: Aluminum Nitride Substrate and Group III Nitride Laminate International Application Date: September 4, 2013 International Application Number: pct / jp2013 / 073806 National Application Number: 201380041307. x The present invention relates to a novel aluminum nitride substrate. Specifically, it relates to a new type aluminum nitride substrate having an aluminum nitride single crystal layer. The aluminum nitride single crystal layer has a specific ...
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